Proximity error correction method for continuous moving stage electron beam writing

No Thumbnail Available
File version
Author(s)
Kasture, Sachin
V. V., Nikesh
Mulay, Gajendra
Gopal, Achanta Venu
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
2012
Size
File type(s)
Location
License
Abstract

Fabrication of high density waveguide-like structures using electron-beam lithography is challenging due to concerns such as stitching errors and proximity issues, which lead to irregularities in the fabricated structure. Continuous moving stage writing method is used to avoid the stitching errors for the long waveguide-like structures, but conventional proximity error correction methods cannot be applied in such cases. The authors propose a simple theoretical method to proximity correct such structures and experimentally demonstrate it in the case of high density millimeter long waveguide-like or grating structures. This method is ideal for high aspect ratio writing, which involves structures that have elements that are much longer than the separation between them. Also, in this method, every element can be assigned a single dose and thus does not need fracturing of individual elements. Experimental results agree well with the theoretically obtained corrections.

Journal Title

Journal of Vacuum Science and Technology Part B: Microelectronics and Nanometer Structure

Conference Title
Book Title
Edition
Volume

30

Issue

5

Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject

Engineering not elsewhere classified

Atmospheric Sciences

Aerospace Engineering

Materials Engineering

Persistent link to this record
Citation
Collections