Fast Near-Interface Traps in 4H-SiC MOS Capacitors Measured by an Integrated-Charge Method

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Chaturvedi, Mayank
Dimitrijev, Sima
Moghadam, Hamid Amini
Haasmann, Daniel
Pande, Peyush
Jadli, Utkarsh
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2021
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Abstract

Oxide traps existing in 4H-SiC MOS capacitors with fast response times that are active in the strong accumulation and depletion regions were characterized by an integrated-charge method. The method is based on the measurement of charging and discharging voltages across MOS capacitors in response to high-frequency voltage pulses. This method can identify traps with response times in the order of hundreds of nanoseconds. The results reveal an increasing density of near-interface traps with energy levels above the bottom of the conduction band, which are the active defects reducing the channel-carrier mobility in 4H-SiC MOSFETs.

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IEEE Access

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9

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Engineering

Electrical engineering

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Industrial electronics

Microelectronics

Nanotechnology

Power electronics

Compound semiconductors

Nanoscale characterisation

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Chaturvedi, M; Dimitrijev, S; Moghadam, HA; Haasmann, D; Pande, P; Jadli, U, Fast Near-Interface Traps in 4H-SiC MOS Capacitors Measured by an Integrated-Charge Method, IEEE Access, 2021, 9, pp. 109745-109753

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