Identification of Polytypes in Sublimation Grown 4H-SiC Crystals by High Resolution X-Ray Diffractometry

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Author(s)
Dong, Jie
Wang, Li
Hu, Xiaobu
Li, Xianxiang
Li, Juan
Jiang, Shouzheng
Chen, Xiufang
Xu, Xiangang
Jiang, Minhua
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Robert P. Devaty, David J. Larkin and Stephen E. Saddow

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2006
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Pittsburgh, Pennsylvania, USA,

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Abstract

4H-SiC single crystal with a diameter of 1.5'' has been grown by the seed sublimation method. Regions of mixed polytypes are assessed by high resolution X-ray diffractometry with the asymmetrical diffraction geometry. Multiple reflections are observed from the rocking curve measurements of a longitudinal cut 4H-SiC slice. Those reflections are indexed to be 2131 and 2131 of 4H-SiC, 2130 , 2131 , 2131 , 2132 and 2132 of 6H-SiC, 2131 , 2132 , 2134 , 2135 and 2137 of 15R-SiC respectively based on the lattice constants of different polytypes in SiC crystal. It is believed that the polytypes can be identified by high resolution X-ray diffractometry.

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Silicon Carbide and Related Materials

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Surfaces and Structural Properties of Condensed Matter

Physical Chemistry (incl. Structural)

Materials Engineering

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