Multiple P-Type SiC Micro-Island with Multi-Step as Termination for 4H-SiC Schottky Barrier Diode

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Wang, X
Cui, Y
Cheong, KY
Xu, M
Zhong, Y
Hu, X
Xu, X
Han, J
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2024
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Suzhou, China

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This article proposes a termination design for 4H-SiC Schottky Barrier Diodes (SBDs) that integrates uniformly distributed multiple P-type micro-island with multi-step. This design eliminates the need for high-energy ion implantation, reducing process costs. By optimizing the length (LP), spacing (SP), and number (NP) of the micro-island, along with the step lengths (Lstep) and numbers (nstep) in the end relaxation region, the device reverse performance can be effectively improved. The study demonstrates that with an LP = 12 μm, SP = 3 μm, NP = 5, Lstep =8 μm, and nstep = 3, the electric field distribution is more uniform under a reverse voltage of 1200 V, achieving a terminal efficiency exceeding 90%. Furthermore, this configuration reduces the terminal area by over 16% compared to a structure comprising solely uniformly distributed P-type micro-islands.

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2024 21st China International Forum on Solid State Lighting & 2024 10th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS)

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Wang, X; Cui, Y; Cheong, KY; Xu, M; Zhong, Y; Hu, X; Xu, X; Han, J, Multiple P-Type SiC Micro-Island with Multi-Step as Termination for 4H-SiC Schottky Barrier Diode, 2024 21st China International Forum on Solid State Lighting & 2024 10th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS), 2024, pp. 99-102