A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator
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Bahreyni, Behraad
Zhu, Yong
Seshia, Ashwin A
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Abstract
A timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.
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IEEE Electron Device Letters
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29
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7
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© 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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Microelectromechanical systems (MEMS)