Growth of diamond-like carbon films using low energy ion beam sputter – bombardment deposition with Ar ions
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Author(s)
Rybachuk, M
Bell, JM
Bell, JM
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Johansson, LSO
Andersen, JN
Gothelid, M
Helmersson, U
Montelius, L
Rubel, M
Setina, J
Wernersson, LE
Date
2008
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Journal of Physics: Conference Series
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100
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Condensed matter physics
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