Electron collisions with atoms, ions, molecules, and surfaces: Fundamental science empowering advances in technology

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Bartschat, Klaus
Kushner, Mark J
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2016
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Abstract

Electron collisions with atoms, ions, molecules, and surfaces are critically important to the understanding and modeling of low-temperature plasmas (LTPs), and so in the development of technologies based on LTPs. Recent progress in obtaining experimental benchmark data and the development of highly sophisticated computational methods is highlighted. With the cesium-based diode-pumped alkali laser and remote plasma etching of Si3 N4 as examples, we demonstrate how accurate and comprehensive datasets for electron collisions enable complex modeling of plasma-using technologies that empower our high-technology-based society.

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Proceedings of the National Academy of Sciences of the United States of America

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113

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26

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Subject

Atomic, molecular and optical physics

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Multidisciplinary Sciences

Science & Technology - Other Topics

electron scattering

close coupling

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Bartschat, K; Kushner, MJ, Electron collisions with atoms, ions, molecules, and surfaces: Fundamental science empowering advances in technology, Proceedings of the National Academy of Sciences of the United States of America, 2016, 113 (26), pp. 7026-7034

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