Electron collisions with atoms, ions, molecules, and surfaces: Fundamental science empowering advances in technology
File version
Author(s)
Kushner, Mark J
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
Size
File type(s)
Location
License
Abstract
Electron collisions with atoms, ions, molecules, and surfaces are critically important to the understanding and modeling of low-temperature plasmas (LTPs), and so in the development of technologies based on LTPs. Recent progress in obtaining experimental benchmark data and the development of highly sophisticated computational methods is highlighted. With the cesium-based diode-pumped alkali laser and remote plasma etching of Si3 N4 as examples, we demonstrate how accurate and comprehensive datasets for electron collisions enable complex modeling of plasma-using technologies that empower our high-technology-based society.
Journal Title
Proceedings of the National Academy of Sciences of the United States of America
Conference Title
Book Title
Edition
Volume
113
Issue
26
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject
Atomic, molecular and optical physics
Science & Technology
Multidisciplinary Sciences
Science & Technology - Other Topics
electron scattering
close coupling
Persistent link to this record
Citation
Bartschat, K; Kushner, MJ, Electron collisions with atoms, ions, molecules, and surfaces: Fundamental science empowering advances in technology, Proceedings of the National Academy of Sciences of the United States of America, 2016, 113 (26), pp. 7026-7034