Single-Crystalline 3C-SiC anodically Bonded onto Glass: An Excellent Platform for High-Temperature Electronics and Bioapplications

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Hoang-Phuong, Phan
Cheng, Han-Hao
Toan, Dinh
Wood, Barry
Tuan-Khoa, Nguyen
Mu, Fengwen
Kamble, Harshad
Vadivelu, Raja
Walker, Glenn
Hold, Leonie
Iacopi, Alan
Haylock, Ben
Dzung, Viet Dao
Lobino, Mirko
Suga, Tadatomo
Nam-Trung, Nguyen
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2017
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Abstract

Single-crystal cubic silicon carbide has attracted great attention for MEMS and electronic devices. However, current leakage at the SiC/Si junction at high temperatures and visible-light absorption of the Si substrate are main obstacles hindering the use of the platform in a broad range of applications. To solve these bottlenecks, we present a new platform of single crystal SiC on an electrically insulating and transparent substrate using an anodic bonding process. The SiC thin film was prepared on a 150 mm Si with a surface roughness of 7 nm using LPCVD. The SiC/Si wafer was bonded to a glass substrate and then the Si layer was completely removed through wafer polishing and wet etching. The bonded SiC/glass samples show a sharp bonding interface of less than 15 nm characterized using deep profile X-ray photoelectron spectroscopy, a strong bonding strength of approximately 20 MPa measured from the pulling test, and relatively high optical transparency in the visible range. The transferred SiC film also exhibited good conductivity and a relatively high temperature coefficient of resistance varying from −12 000 to −20 000 ppm/K, which is desirable for thermal sensors. The biocompatibility of SiC/glass was also confirmed through mouse 3T3 fibroblasts cell-culturing experiments. Taking advantage of the superior electrical properties and biocompatibility of SiC, the developed SiC-on-glass platform offers unprecedented potentials for high-temperature electronics as well as bioapplications.

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ACS Applied Materials and Interfaces

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9

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Microelectromechanical systems (MEMS)

Materials engineering

Nanomaterials

Chemical sciences

Engineering

Physical sciences

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