Dipole Type Behavior of NO Grown Oxides on 4H–SiC

No Thumbnail Available
File version
Author(s)
Haasmann, D
Moghadam, HA
Han, J
Aminbeidokhti, A
Iacopi, A
Dimitrijev, S
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
2016
Size
File type(s)
Location
License
Abstract

In this paper, we present surprising MOS capacitor C–V bias instability observed in NO-grown oxides, with distinctly different behavior compared to that of conventional NO-annealed oxides on 4H-SiC. Using sequential back-and-forth and bias-temperature stress C–V measurements, it was demonstrated that the C–V shift direction of NO-grown oxides was opposite to that of NO-annealed oxides. A model based on bias-temperature stress orientated near-interfacial dipoles is proposed to explain this unique behavior of NO-grown oxides.

Journal Title

Materials Science Forum

Conference Title
Book Title
Edition
Volume

858

Issue
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject

Physical chemistry

Physical chemistry not elsewhere classified

Materials engineering

Persistent link to this record
Citation
Collections