Noise in Piezoelectric MEMS: A Review
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Mohd-Yasin, F
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Abstract
This review summarizes noise related works on piezoelectric MEMS. First, fundamentals of piezoelectricity and noise sources are covered. Then, around 100 papers are tabulated based on types of MEMS, authors, year of publication, piezoelectric materials, and nature of noise works i.e. theoretical, simulation, and measurement. Based on that table, we also discuss noise models, current trends, and future directions on this topic. This review is beneficial for researchers that develop next generation piezoelectric MEMS. In the future, influence of noise must be seriously taken into design considerations as the dimension of MEMS becomes smaller, but the complexities are higher.
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IEEE Sensors Journal
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Ali, G; Mohd-Yasin, F, Noise in Piezoelectric MEMS: A Review, IEEE Sensors Journal, 2025