The Mechanical Characterization of (100) and (111) 3C-SiC Thin Film for MEMS Capacitive Pressure Sensor Application in Extreme Environments

No Thumbnail Available
File version
Author(s)
Marsi, Noraini
Majlis, Burhanuddin Yeop
Hamzah, Azrul Azlan
Mohd-Yasin, Faisal
Griffith University Author(s)
Mohd-Yasin, Faisal
Primary Supervisor
Other Supervisors
Editor(s)

Cheong Kuan Yew

Date
2013
Size
File type(s)
Location

Penang, Malaysia

License
Journal Title
Conference Title

3rd International Conference on the Advancement of Materials and Nanotechnology

Book Title
Edition
Volume
Issue
Thesis Type
Degree Program
School
Publisher link
http://nicerrg.wordpress.com/2013/02/14/3rd-international-conference-on-the-advancement-of-materials-and-nanotechnology-2013-icamn-iii-2013/
DOI
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject

Microelectronics and Integrated Circuits

Microelectromechanical Systems (MEMS)

Persistent link to this record
http://hdl.handle.net/10072/61152
Citation
Collections
Conference outputs