Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor

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Author(s)
Tong, B
Nguyen, HQ
Nguyen, TH
Nguyen, TK
Nguyen, VT
Dinh, T
Vu, TH
Dau, VT
Dao, DV
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2022
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Dallas, USA

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Abstract

This paper presents an innovative stress amplification approach for enhancing the sensitivity of piezoresistive pressure sensors. The structure consists of two pillars raised from the membrane supporting a released 3C-SiC micro-beam which acts as the sensing element. The proposed design was demonstrated using a 3C-SiC/Si heterostructure. Experimental results found our device highly sensitive, with a high sensitivity of 0.1328 kPa-1. The sensitivity improvement was attributed to the stress-amplification phenomenon observed in our free-standing structure. Analytical and numerical methods confirmed that our device increases the stress/sensitivity by 750% over a traditional membrane structure.

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Proceedings of 2022 IEEE Sensors

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Nanotechnology

Nanomaterials

Electronics, sensors and digital hardware

Materials engineering

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Tong, B; Nguyen, HQ; Nguyen, TH; Nguyen, TK; Nguyen, VT; Dinh, T; Vu, TH; Dau, VT; Dao, DV, Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor, Proceedings of 2022 IEEE Sensors, 2022