Reliability Measurement of Single Axis Capacitive Accelerometers Employing Mechanical, Thermal and Acoustic stresses

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Author(s)
Zaiyadi, N
Mohd.-Yasin, F
Nagel, DJ
Korman, CE
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Ken Jones

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2009
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254301 bytes

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College Park, MD, USA

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The purpose of this paper is to employ the QALT procedure on single axis accelerometers from Analog Device and Freescale. Laser-precision apparatus was designed, built, and employed to provide three types of excitations with great accuracy; mechanical (gravitational) test, thermal test and acoustical test. These tests are designed to mimic the operating conditions of the system, where the devices are employed.

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2009 International Semiconductor Device Research Symposium, ISDRS '09

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© 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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Electrical and Electronic Engineering not elsewhere classified

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