Dual-Function Multichannel Acoustofluidic Particle Manipulation Enabled by a PMUT Array

No Thumbnail Available
File version
Author(s)
Qian, Jingui
Zhang, Junjie
Li, Xianbin
Huang, Liang
Hu, Xuefeng
Lee, Joshua E-Y
Zhang, Wei
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
2024
Size
File type(s)
Location
License
Abstract

We have developed a technique of on-chip multisite acoustofluidic manipulation using aluminum nitride on silicon (AlN-on-Si) piezoelectric micromachined ultrasonic transducers (PMUTs). We demonstrate nine-channel acoustically driven particle enrichment on a 3times 3 PMUT array fabricated on a micromachined chip by simply exciting a single PMUT. Adding a micro-oil droplet to just one PMUT enables the multichannel particle enrichment and stirring simultaneously. Compared with the larger surface acoustic wave (SAW) devices, the proposed acoustic tweezing method enabled by plane waves generated from the PMUT presents unique merits: 1) highly localized particle manipulation directly on the PMUTs; 2) the ability to manipulate particles in arrays at chip scale; and 3) synchronous dual-function particle manipulation modes driven by a single device within the chip. These unique features render the possibility of integrated circuit compatible acoustofluidics for high throughput bead-based bioassays in lab-on-a-chip (LOC) platforms.

Journal Title

IEEE Transactions on Electron Devices

Conference Title
Book Title
Edition
Volume

71

Issue

8

Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject
Persistent link to this record
Citation

Qian, J; Zhang, J; Li, X; Huang, L; Hu, X; Lee, JE-Y; Zhang, W, Dual-Function Multichannel Acoustofluidic Particle Manipulation Enabled by a PMUT Array, IEEE Transactions on Electron Devices, 2024, 71 (8), pp. 4932-4938

Collections