Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect

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Author(s)
Mohd-Yasin, F
Nagel, DJ
Ong, DS
Korman, CE
Chuah, HT
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Arimoto, H

Date
2007
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530660 bytes

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Kyoto, JAPAN

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Abstract

In this work, a noise measurement of capacitive micro-accelerometers incorporating temperature effect is presented. In the setup, a hot plate is used to heat the device up to temperatures in the 75 degree C range. A thermo couple attached to the enclosure is used to assess its temperature. The data show that the noise power increases at high temperature, but not as significant as predicted by the theory.

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MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS

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© 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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Electrical and Electronic Engineering not elsewhere classified

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