HWCVD a-Si: H Interlayer Slope Waveguide Coupler for Multilayer Silicon Photonics Platform

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Author(s)
Petra, Rafidah
Oo, Swe Zin
Tarazona, Antulio
Cernansky, Robert
Reynolds, Scott
Thomson, David J
Khokhar, Ali Z
Politi, Alberto
Mashanovich, Goran Z
Reed, Graham T
Chong, Harold MH
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2017
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Berlin, Germany
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Abstract

We present an interlayer slope waveguide, designed to guide light from one level to another level in a multilayer silicon photonics platform. The waveguide is fabricated using HWCVD a-Si:H at 350 o C. Measured loss of 0.5 dB/slope was obtained at a wavelength of 1550 nm and for TE mode polarization.

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2017 IEEE 14th International Conference on Group IV Photonics (GFP)
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Photonic and electro-optical devices, sensors and systems (excl. communications)
Science & Technology
Physical Sciences
Engineering, Electrical & Electronic
Optics
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Citation
Petra, R; Oo, SZ; Tarazona, A; Cernansky, R; Reynolds, S; Thomson, DJ; Khokhar, AZ; Politi, A; Mashanovich, GZ; Reed, GT; Chong, HMH, HWCVD a-Si: H Interlayer Slope Waveguide Coupler for Multilayer Silicon Photonics Platform, 2017 IEEE 14th International Conference on Group IV Photonics (GFP), 2017, pp. 47-48