HWCVD a-Si: H Interlayer Slope Waveguide Coupler for Multilayer Silicon Photonics Platform
File version
Author(s)
Oo, Swe Zin
Tarazona, Antulio
Cernansky, Robert
Reynolds, Scott
Thomson, David J
Khokhar, Ali Z
Politi, Alberto
Mashanovich, Goran Z
Reed, Graham T
Chong, Harold MH
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
Size
File type(s)
Location
Berlin, Germany
License
Abstract
We present an interlayer slope waveguide, designed to guide light from one level to another level in a multilayer silicon photonics platform. The waveguide is fabricated using HWCVD a-Si:H at 350 o C. Measured loss of 0.5 dB/slope was obtained at a wavelength of 1550 nm and for TE mode polarization.
Journal Title
Conference Title
2017 IEEE 14th International Conference on Group IV Photonics (GFP)
Book Title
Edition
Volume
Issue
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject
Photonic and electro-optical devices, sensors and systems (excl. communications)
Science & Technology
Physical Sciences
Engineering, Electrical & Electronic
Optics
Persistent link to this record
Citation
Petra, R; Oo, SZ; Tarazona, A; Cernansky, R; Reynolds, S; Thomson, DJ; Khokhar, AZ; Politi, A; Mashanovich, GZ; Reed, GT; Chong, HMH, HWCVD a-Si: H Interlayer Slope Waveguide Coupler for Multilayer Silicon Photonics Platform, 2017 IEEE 14th International Conference on Group IV Photonics (GFP), 2017, pp. 47-48