Fabrication of planar GaN-based micro-pixel light emitting diode arrays
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Author(s)
McKendry, J.J.D.
Guilhabert, Benoit
Gong, Zheng
Watson, Ian M.
Gu, Erdan
Dawson, Martin D.
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Belek Antalya, TURKEY
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Abstract
We report a new processing approach which enables the fabrication of planar GaN-based micro-pixel LED arrays. This process is based on selective passivation of the p-doped GaN surface by a CHF(3) plasma treatment.
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2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS
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© 2009 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
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Photonics, Optoelectronics and Optical Communications