Ultra-high strain in epitaxial silicon carbide nanostructures utilizing residual stress amplification
File version
Accepted Manuscript (AM)
Author(s)
Tuan-Khoa, Nguyen
Toan, Dinh
Ina, Ginnosuke
Kermany, Atieh Ranjbar
Qamar, Afzaal
Han, Jisheng
Namazu, Takahiro
Maeda, Ryutaro
Dzung, Viet Dao
Nam-Trung, Nguyen
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
Size
File type(s)
Location
License
Abstract
Strain engineering has attracted great attention, particularly for epitaxial films grown on a different substrate. Residual strains of SiC have been widely employed to form ultra-high frequency and high Q factor resonators. However, to date, the highest residual strain of SiC was reported to be limited to approximately 0.6%. Large strains induced into SiC could lead to several interesting physical phenomena, as well as significant improvement of resonant frequencies. We report an unprecedented nanostrain-amplifier structure with an ultra-high residual strain up to 8% utilizing the natural residual stress between epitaxial 3C-SiC and Si. In addition, the applied strain can be tuned by changing the dimensions of the amplifier structure. The possibility of introducing such a controllable and ultra-high strain will open the door to investigating the physics of SiC in large strain regimes and the development of ultra sensitive mechanical sensors.
Journal Title
Applied Physics Letters
Conference Title
Book Title
Edition
Volume
110
Issue
14
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
© 2017 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Appl. Phys. Lett. 110, 141906 (2017) and may be found at http://dx.doi.org/10.1063/1.4979834.
Item Access Status
Note
Access the data
Related item(s)
Subject
Physical sciences
Condensed matter physics not elsewhere classified
Engineering