Novel SiC Accumulation-Mode Power MOSFET
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Dimitrijev, S
Weitzel, CE
Harrison, HB
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Abstract
In this paper, a new structure of Silicon Carbide (SiC) accumulation-mode MOSFET (ACCUFET) for high-power applications has been proposed and analyzed. The novel ACCUFET utilizes fully depleted N-channel epilayer, grown on P-base epilayer, to achieve normally-off operation. A trench region is formed by etching and is implanted to create N-type path that connects the N-channel epilayer (accumulation channel) to underlaying N-drift region. Detailed analysis of the important design parameters of the novel structure is performed using MEDICI two-dimensional (2-D) device simulator. The novel structure was also compared to alternative ACCUFET approaches, specifically planar and trench-gate ACCUFETs. The comparison shows that the novel structure provides the highest figure of merit (FOM) for power devices
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IEEE Transactions on Electron Devices
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48
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8
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© 2001 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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Electronics, sensors and digital hardware