Two and three dimensional polymeric structures at the nano and micro scale are increasingly being incorporated into micro and nano scale devices. Soft lithography can be employed for the creation of templates where a polymer replica can be produced. Obtaining a master is one of the limiting factors in the production of such replicas. This study demonstrates pattern generation on a highly durable and flat diamond-likecarbon (DLC) film with micro/nano-scale resolution using the atomic force microscope (AFM). The AFM is operated in the electrical conductivity mode which induces oxidation on the DLC surface. The technique offers features with line widths less than 20 nm. As a result, highly complex shapes can be produced with a depth being controlled by the DLC film thickness and/or by the bias voltage parameters.