Ni-assisted fabrication of GaN based surface nano-textured light emitting diodes for improved light output power
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Ryu, Beo Deul
Han, Min
Yang, Jong Han
Lysak, Volodymyr V.
Hong, Chang-Hee
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Abstract
Light enhancement of GaN based light emitting diodes (LEDs) have been investigated by texturing the top p-GaN surface. Nano-textured LEDs have been fabricated using self-assembled Ni nano mask during dry etching process. Experimental results were further compared with simulation data. Three types of LEDs were fabricated: Conventional (planar LED), Surface nano-porous (porous LED) and Surface nano-cluster (cluster LED). Compared to planar LED there were about 100% and 54% enhancement of light output power for porous and cluster LED respectively at an injection current of 20 mA. Moreover, simulation result showed consistency with experimental result. The increased probability of light scattering at the nano-textured GaN-air interface is the major reason for increasing the light extraction efficiency.
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Journal of Semiconductor Technology and Science
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15
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4
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Electrical and Electronic Engineering not elsewhere classified