Opto-electronic coupling in semiconductors: towards ultrasensitive pressure sensing

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Author(s)
Thanh, Nguyen
Toan, Dinh
Hoang-Phuong, Phan
Tuan-Khoa, Nguyen
Foisal, Abu Riduan Md
Nam-Trung, Nguyen
Dzung, Viet Dao
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2020
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Abstract

The discovery of a giant piezoresistive effect in a semiconductor heterojunction by optoelectronic coupling can open a new era for mechanical sensors. This paper develops a novel concept of opto-electronic coupling in semiconductor heterojunctions for pressure sensing. We employ non-uniform illumination of visible light on a SiC/Si heterojunction to generate a gradient of charge carriers in the SiC nanofilm. These charge carriers are then manipulated by a tuning current, producing giant relative resistance changes in the material under applied pressure. We successfully demonstrated the enhancement by opto-electronic coupling in a SiC/Si heterojunction pressure sensor of sensitivity up to 185 000 times compared to the unilluminated condition. In addition, the opto-electronic coupling enables significantly improved repeatability, stability, signal-to-noise ratio and detectable range of the pressure sensor. The ultrahigh sensitive pressure sensing mechanism by opto-electronic coupling will pave a way for development of extremely sensitive mechanical sensors.

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Journal of Materials Chemistry C

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8

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14

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© 2020 Royal Society of Chemistry. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal website for access to the definitive, published version.

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Macromolecular and materials chemistry

Physical chemistry

Materials engineering

Science & Technology

Physical Sciences

Materials Science, Multidisciplinary

Physics, Applied

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Thanh, N; Toan, D; Hoang-Phuong, P; Tuan-Khoa, N; Foisal, ARM; Nam-Trung, N; Dzung, VD, Opto-electronic coupling in semiconductors: towards ultrasensitive pressure sensing, Journal of Materials Chemistry C, 2020, 8 (14), pp. 4713-4721

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