A MEMS Nanopositioner with Thermal Actuator and on-chip Thermal Sensor

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Zhu, Y
Moheimani, SOR
Yuce, MR
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Gary K. Fedder
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2010
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Abstract

This paper describes the design of a micromachined nanopositioner with electrothermal actuation and sensing capabilities in a single silicon chip. The positioner has a dynamic range of 14.4 μm with a differential sensing scheme. At 6-V dc bias voltage, the position sensors have a power consumption of 120 mW, and a sensitivity of 0.27 mV/nm. The open-loop bandwidth is 101 Hz and the phase delay from 1 Hz to 51.2 kHz is 169஠The on-chip displacement sensing enables a feedback control

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2010 IEEE SENSORS
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© 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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Microelectromechanical systems (MEMS)
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