Design Optimization and Finite Element Analysis of 3C-SiC Bio-Sensors based on Dogbone Resonator

No Thumbnail Available
File version
Author(s)
Iqbal, A
Mohd-Yasin, F
Dimitrijev, S
Griffith University Author(s)
Primary Supervisor
Other Supervisors
Editor(s)
Date
2014
Size
File type(s)
Location
License
Abstract

This paper presents the optimized design and Finite Element Analysis (FEA) of a bio sensor based on cubic silicon carbide (3C-SiC) for pathogen detection. Silicon Carbide is chosen due to its excellent material properties and chemical stability compared to silicon in varying environmental conditions. The desired resonance frequency is optimized using matlab and the finite element analysis is carried out using COMSOL and Intellisuite software's. The effect of the residual stress on the desired mode of resonant frequency and the fabrication feasibility of the proposed resonator fabrication are studied using FEA analysis. The mathematical modeling of thermally actuation and piezoresistive sensing for the design resonator bio sensors are illuminated. The close agreement between the analytical model and finite element analysis verify the design of proposed bio sensors.

Journal Title

Applied Mechanics and Materials

Conference Title
Book Title
Edition
Volume

595

Issue
Thesis Type
Degree Program
School
Publisher link
Patent number
Funder(s)
Grant identifier(s)
Rights Statement
Rights Statement
Item Access Status
Note
Access the data
Related item(s)
Subject

Engineering

Microelectronics

Microelectromechanical systems (MEMS)

Persistent link to this record
Citation
Collections